2

Development of piezoelectric MEMS deformable mirror

Year:
2011
Language:
english
File:
PDF, 353 KB
english, 2011
29

Piezoelectric MEMS for energy harvesting

Year:
2015
Language:
english
File:
PDF, 835 KB
english, 2015
38

Concepts for a new class of all-polymer micropumps

Year:
2006
Language:
english
File:
PDF, 591 KB
english, 2006
44

Fabrication of single crystal PZT thin films on glass substrates

Year:
2007
Language:
english
File:
PDF, 412 KB
english, 2007